Vacuum Ion Cleaning Machine/vacuum plasma cleaning machine/vacuum coating machine ZHQ100PR
Plasma is a type of ionized gas which positive ion and electron density roughly equal. Because the plasma is combination which has a higher energy than gas, when in plasma environment matter can gain much more physical and chemical characteristics.
Remark: The chamber size can be designed by customers' product and special process request
Plasma cleaning equipment operating principle is depend on the "activization" of matter whcin in"plasma state to remove the stains of production surface Judging from present various types of cleaning method, plasma cleaning the most thorough ablative way of all cleaning ways.
Equipment can widely applied to semiconductor, mi-electronics, front COG, LCD, LCM and LED processing, precision cleaning before device package, vacuum electron,connector,electric reloy and the solar PV industry etc, and also applied to the field of surface cleaning of plastic,rubber,metal and ceramics, etching process, ashing process,surlace activation and Life Science Experiment etc.
Detailed product parameters
| Model | ZHQ100PR |
| Inner size of vacuum room | Ф505x455x 450 |
| Equipment Data | Weight: 1200 Kg / Power: 20KW / Voltage: 380V |
| Application field | iatrotechnique, electronic communication, solar battery, PCB processing, LCD,LCM |
| Technology | vacuum coating |
| Substrate | plastic, metel etc. |
| The material of chamber | Stainless steel |
| Control system | Manual,Semi-automatic, Fully automatic |
| Operation system | Touch screen+PLC |
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